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Optical Scattering - Measurements and Analysis, Third Edition



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Optical Scattering - Measurements and Analysis, Third Edition
ISBN: 0819492515 | 330 pages | PDF | 7,5 MB

The first edition of this book concentrated on relating scatter from optically smooth surfaces to the microroughness on those surfaces. After spending six years in the semiconductor industry, Dr. Stover has updated and expanded the third edition. Newly included are scatter models for pits and particles as well as the use of wafer scanners to locate and size isolated surface features. New sections cover the multimillion-dollar wafer scanner business, establishing that microroughness is the noise, not the signal, in these systems.
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